Materials and reliability issues in MEMS and microsystems

Aristos Christou

doi:10.1117/12.448984

21 November 2001 Materials and reliability issues in MEMS and microsystems

Aristos Christou

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448984
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

MEMs are basically sensors and actuators in a harsh environment or strains exceeding 10² and strain rates approaching shock deformation conditions. The reliability concerns are electronic, optical and micro-mechanical. Surface morphology of sensors and actuators becomes critical and the investigation presents results on diamond like films developed for resolving tribology related problems in MEMs rotating surfaces. Other MEMs results on surface passivation are reviewed.

Citation Download Citation

Aristos Christou "Materials and reliability issues in MEMS and microsystems", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448984

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available