Integration of active materials with silicon micromachining: applications to optical MEMS

Jean-Philippe Gouy; Yasuhiko Arakawa; Hiroyuki Fujita

doi:10.1117/12.448979

21 November 2001 Integration of active materials with silicon micromachining: applications to optical MEMS

Jean-Philippe Gouy, Yasuhiko Arakawa, Hiroyuki Fujita

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448979
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Most of the MOEMS including optical switches and micro optical benches are developed on silicon. As for the MEMS, the main reason is that silicon has consistently been the material of choice for the microelectronics industry, due to a mature processing technology which offers the possibility to integrate MEMS devices with Integrated Circuits in a low cost batch fabrication process. However, since the beginning of Optoelectronic, silicon has been suffering from its poor efficiency to emit light because of its indirect band gap. Optical active devices can be integrated on silicon by combining specific active materials in order to keep the main advantage of silicon micromachining for MOEMS applications. This paper illustrates this purpose through one project developed in the frame of the LIMMS, joint laboratory between France and Japan. This project deals with optical active devices for which silicon micromachining technology has been employed to fabricate an organic semiconductors based light emitted diode on silicon substrate.

Citation Download Citation

Jean-Philippe Gouy, Yasuhiko Arakawa, and Hiroyuki Fujita "Integration of active materials with silicon micromachining: applications to optical MEMS", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448979

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Silicon

Photomasks

Organic light emitting diodes

Organic semiconductors

Microopto electromechanical systems

Micromachining

Aluminum

Show All Keywords

Keywords/Phrases

Search In:

Publication Years