Fabrication of integrated micromachined polymer magnet

Olarn Rojanapornpun; Chee Yee Kwok

doi:10.1117/12.448986

21 November 2001 Fabrication of integrated micromachined polymer magnet

Olarn Rojanapornpun, Chee Yee Kwok

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448986
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this paper, the technique for fabricating integrated polymer magnet suitable for microelectromechanical system (MEMS) is discussed. Spin coating and screen printing techniques have been reported by other researchers, however, obtaining small feature sizes and good alignment accuracy are difficult. Furthermore, from our experiments, spin coating of composite material results in unacceptable surface roughness and it is difficult to obtain high powder loading. The paper discusses the technique of implementing template printing where the sacricial layer is used to form the template for polymer magnet structure. Instead of dispersing magnetic powder into the matrix material, magnetic powder is filled into template follow by embedding of matrix material. This technique has the advantages of improved alignment accuracy, minimum structure size achievable, and high magnetic powder loading. Strontium ferrite/polyimide composite structure has been fabricated. Integrated polymer magnet as small as 100 micrometers in diameter has been achieved. Alignment is only limited by alignment of the template using mask aligner used by typical photolithography step. Volume loading of 65%, Residual magnetic flux density Br of 0:21 T, Intrinsic coercivity H_ci of 325 kA/m, and maximum energy product (BH)_max of 8145 T A/m were achieved.

Citation Download Citation

Olarn Rojanapornpun and Chee Yee Kwok "Fabrication of integrated micromachined polymer magnet", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448986

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