High-performance MEMS bandpass filters for acoustic signal processing applications

Shih-Hsorng Shen; Shuenn-Tsong Young; Weileun Fang

doi:10.1117/12.449159

21 November 2001 High-performance MEMS bandpass filters for acoustic signal processing applications

Shih-Hsorng Shen, Shuenn-Tsong Young, Weileun Fang

Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449159
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

A novel Micro-Electro-Mechanical System (MEMS) filter is proposed for direct acoustic signal processing. Compared with contemporary post-signal processing techniques with digital signal processors (DSP), our proposed MEMS filters generate the transformed information without the DSP incorporation. Owing to their excellent characteristics, the MEMS filter will be an effective device for acoustic signal processing. Coupling with the phase and the amplitude shift near resonant frequency, two and above micromachined structures are used to comprise the proposed MEMS filter. In the study, we designed and simulated the MEMS filters, consisting of different resonating structures, to process acoustic signals. With the simulation results, the optimized parameters of the structure can be followed by the MEMS Q factor, a new characteristic parameter for MEMS filter, versus the damping factor chart. Under the fine-tuning of the two parameters, all the desired MEMS filters can be easily realized.

Citation Download Citation

Shih-Hsorng Shen, Shuenn-Tsong Young, and Weileun Fang "High-performance MEMS bandpass filters for acoustic signal processing applications", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449159

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