Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium-oxide particles

Jesper Ederth; Annette Hultaker; Peter Heszler; Gunnar A. Niklasson; Claes-Goeran Granqvist; Arie K. Jansen van Doorn; Chris van Haag; Michel J. Jongerius; Detlef Burgard

doi:10.1117/12.454615

19 November 2001 Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium-oxide particles

Jesper Ederth, Annette Hultaker, Peter Heszler, Gunnar A. Niklasson, Claes-Goeran Granqvist, Arie K. Jansen van Doorn, Chris van Haag, Michel J. Jongerius, Detlef Burgard

Author Affiliations +

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454615
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Thin films were made by spinning a dispersion of tin-doped indium-oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity (rho) of 0.3 (Omega) m and some optical absorption. Annealing in vacuum at 200 to 400 degree(s)C for 2 h, and subsequently in air at 500 degree(s)C for 2 h, produced films with (rho) equals10^--3 (Omega) m and a visible transmittance exceeding 90 %. Leaving out the vacuum treatment yielded higher resistivity.

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Jesper Ederth, Annette Hultaker, Peter Heszler, Gunnar A. Niklasson, Claes-Goeran Granqvist, Arie K. Jansen van Doorn, Chris van Haag, Michel J. Jongerius, and Detlef Burgard "Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium-oxide particles", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454615

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