Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process

William B. Spillman Jr.; Tingying Zeng; Richard O. Claus

doi:10.1117/12.454599

19 November 2001 Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process

William B. Spillman Jr., Tingying Zeng, Richard O. Claus

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454599
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

The electo-static self-assembly process (ESA) has proved to be extremely successful in creating multi-layer coatings with properties that can be tailored for particular applications. In this process, almost any surface with charged functional groups can be used as a substrate. Alternate dipping in solutions having ions of opposite charge builds up the layers through ionic bonding. One particular application of this process could be to form multi-functional bio-compatible coatings on MEMS devices intended for use in-vivo. In this paper, we describe two different models of the process based on cellular automata. The output of the models consists of three parameters as a function of layer: ionic coverage, film height and film roughness. The results of the models are compared to experimental data to determine which of them more accurately describes the ESA process.

Citation Download Citation

William B. Spillman Jr., Tingying Zeng, and Richard O. Claus "Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454599

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