Development of a microrobot-based micropositioning station: the microrobot and its position and orientation measurement method

Sounkalo Dembele; Karima Rochdi; Patrick Sandoz; Patrice Lemoal

doi:10.1117/12.444141

8 October 2001 Development of a microrobot-based micropositioning station: the microrobot and its position and orientation measurement method

Sounkalo Dembele, Karima Rochdi, Patrick Sandoz, Patrice Lemoal

Author Affiliations +

Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444141
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

The paper deals with the development of a micropositioning station that can be used in manufacturing systems, microfactories, AFM or SNOM microscopes. The central element of the station is a standing waves ultrasonic linear motor. It is a jump-stick-slip driving mechanism that can make longitudinal and lateral shiftings, and rotations in the horizontal plane. Its main merits are its ability to perform microscale displacements and to support heavy pre-loads. An adequate drive-amplifier is developed, allowing the control of the system. Even, a phase sensitive vision method is developed to sense the position and the heading angle with an accuracy better than 0.2 pixel i.e. 12 micrometers with an observed field of about 4 x 3 cm². A personnel computer controls the whole system.

Citation Download Citation

Sounkalo Dembele, Karima Rochdi, Patrick Sandoz, and Patrice Lemoal "Development of a microrobot-based micropositioning station: the microrobot and its position and orientation measurement method", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444141

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available