Design and detection of superprecision positioning stage with nanometer resolution

Chunyong Yin; Dejiao Lin; Jian Wu; Rui Zhang

doi:10.1117/12.447317

5 November 2001 Design and detection of superprecision positioning stage with nanometer resolution

Chunyong Yin, Dejiao Lin, Jian Wu, Rui Zhang

Proceedings Volume 4444, Optomechanical Design and Engineering 2001; (2001) https://doi.org/10.1117/12.447317
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A precision positioning system with a high displacement resolution has been widely required for modern industrialized applications, such as microelectronics, super-precision manufacturing etc. This paper discusses the design and the features of a new piezo driven precision micro positioning stage utilizing flexure hinges. Theoretical analysis for the stiffness of the flexure hinge is also given briefly. A piezoelectric ceramic is applied to drive the precision state, whose displacement can reach 5 micrometers when employed with 1000 voltage power. In order to testify the robust and measurement stability of the precision sta, three kinds of PZT produced in Germany, Japan and China respectively are utilized. A dual-frequency interferometer with nanometer resolution and accuracy is adopted to evaluate the mechanical characteristics of the positioning stage. The experimental result shows that the open loop control of the stage provides 0.2nm positioning resolution along the moving direction.

Citation Download Citation

Chunyong Yin, Dejiao Lin, Jian Wu, and Rui Zhang "Design and detection of superprecision positioning stage with nanometer resolution", Proc. SPIE 4444, Optomechanical Design and Engineering 2001, (5 November 2001); https://doi.org/10.1117/12.447317

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