Optical near-field effects in surface nanostructuring and laser cleaning

H.-J. Muenzer; Mario Mosbacher; M. Bertsch; Oliver Dubbers; F. Burmeister; A. Pack; Reinhold Wannemacher; B.-U. Runge; Dieter Baeuerle; Johannes Boneberg; Paul Leiderer

doi:10.1117/12.456827

25 February 2002 Optical near-field effects in surface nanostructuring and laser cleaning

H.-J. Muenzer, Mario Mosbacher, M. Bertsch, Oliver Dubbers, F. Burmeister, A. Pack, Reinhold Wannemacher, B.-U. Runge, Dieter Baeuerle, Johannes Boneberg, Paul Leiderer

Author Affiliations +

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456827
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We present a method for directly imaging the undisturbed near field of a particle resting on a surface. A comparison with numerical computations shows good agreement with the results of our experiments. These results have important consequences for laser-assisted particle removal where field enhancement may cause local surface damage and is one of the physical key processes in this cleaning method. On the other hand, the application of near fields at particles allows structuring of surfaces with structure dimensions in the order of 100 nm and even below.

Citation Download Citation

H.-J. Muenzer, Mario Mosbacher, M. Bertsch, Oliver Dubbers, F. Burmeister, A. Pack, Reinhold Wannemacher, B.-U. Runge, Dieter Baeuerle, Johannes Boneberg, and Paul Leiderer "Optical near-field effects in surface nanostructuring and laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456827

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