Highly reliable high-power 266-nm all-solid-state UV laser

Tetsuo Kojima; Susumu Konno; Shuichi Fujikawa; Masaki Seguchi; Yushi Takenaka; Koji Yasui; Tomosumi Kamimura; Masashi Yoshimura; Yusuke Mori; Takatomo Sasaki; Mitsuhiro Tanaka; Yukikatsu Okada

doi:10.1117/12.456902

25 February 2002 Highly reliable high-power 266-nm all-solid-state UV laser

Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, Masaki Seguchi, Yushi Takenaka, Koji Yasui, Tomosumi Kamimura, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Mitsuhiro Tanaka, Yukikatsu Okada

Author Affiliations +

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456902
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We obtained the 266nm UV power of 23W by fourth-harmonic generation using a high-brightness high-power all-solid- state green laser and a high-quality CLBO crystal. This value is, to our knowledge, the highest UV power below 300nm wavelength. Moreover, the UV-power variation was negligibly small by using high-crystal CLBO crystals.

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Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, Masaki Seguchi, Yushi Takenaka, Koji Yasui, Tomosumi Kamimura, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Mitsuhiro Tanaka, and Yukikatsu Okada "Highly reliable high-power 266-nm all-solid-state UV laser", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456902

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