High-speed microvia formation with UV solid state lasers

Corey M. Dunsky; Hisashi Matsumoto; Glenn Simenson

doi:10.1117/12.456885

25 February 2002 High-speed microvia formation with UV solid state lasers

Corey M. Dunsky, Hisashi Matsumoto, Glenn Simenson

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456885
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Laser drilling has emerged in the last five years as the most widely accepted method of creating microvias in high- density electronic inter connect and chip packaging devices. Most commercially available laser drilling tools are currently based on one of two laser types: far-IR CO₂ lasers and UV solid state lasers at 355 nm. While CO₂ lasers are recognized for their high average power and drilling throughput, UV lasers are known for high precision material removal and their ability to drill the smallest vias, with diameters down to about 25-30 micrometers now achievable in production. This paper presents a historical overview of techniques for drilling microvias with UV solid state lasers. Blind and through via formation by percussion drilling, trepanning, spiralling, and image projection with a shaped beam are discussed. Advantages and range of applicability of each technique are summarized. Drivers of throughput scaling over the last five years are outlined and representative current-generation performance is presented.

Citation Download Citation

Corey M. Dunsky, Hisashi Matsumoto, and Glenn Simenson "High-speed microvia formation with UV solid state lasers", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456885

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available