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We simulate the structure of surface MEMS RF switch by suing ANSYS electrostatic and mechanical energy coupled analysis with established models. In this paper actuation voltage for different geometrical scales of suspended beam contacted switch are discussed. The dependence of actuation voltage on the Yang's module, size of cantilever and electrode area is calculated.
Ming Jia,Fangmin Guo,Ziqiang Zhu,Zongsheng Lai,Jianpeng Chu,Yaolin Wang,Xiaohong Ge, andYirong Yang
"Theoretical study of surface MEMS rf switch structure", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440199
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