Magnetic field sensing film (Ni0.81Fe0.19) 0.66Cr0.34/Ni0.81Fe0.19

Xiaofei Yang; Zilong Peng; Hongwei Liao; Zuoyi Li

doi:10.1117/12.440234

14 September 2001 Magnetic field sensing film (Ni_0.81Fe_0.19)_0.66Cr0.34/Ni_0.81Fe_0.19

Xiaofei Yang, Zilong Peng, Hongwei Liao, Zuoyi Li

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440234
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

Anisotropic magnetoresistance (AMR) effect thin film sensor has a very wide prospect in application. In this paper, we studied the structure, the AMR and the size effect of the Permalloy film with (Ni_0.81Fe_0.19)_0.66Cr_0.34 layer as buffer layer. The resistance of NiFeCr is larger than that of Ta and has the same face-cubic structure as NiFe, which could depress the current shunting effectively and be benefit to the formation of the well-textured NiFe layer. The measurements of XRD and AFM showed that, the specimens with (Ni_0.81Fe_0.91)_0.66Cr_0.34 and Ta buffer have close surface roughness, while the former had more textured structure. (Delta) R/R decreased and the saturation field increased with the reduction of the width of the AMR stripes etched by ion beam. However, the magnetic field sensitivity could still reach 0.16 percent/Oe when the width reduce to 30micrometers , and could correctly respond to an alternative magnetic field.

Citation Download Citation

Xiaofei Yang, Zilong Peng, Hongwei Liao, and Zuoyi Li "Magnetic field sensing film (Ni_0.81Fe_0.19)_0.66Cr0.34/Ni_0.81Fe_0.19", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440234

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