0.11-um imaging in KrF lithography using dipole illumination

Mark Eurlings; Eelco van Setten; Juan Andres Torres; Mircea V. Dusa; Robert John Socha; Luigi Capodieci; Jo Finders

doi:10.1117/12.425215

26 April 2001 0.11-μm imaging in KrF lithography using dipole illumination

Mark Eurlings, Eelco van Setten, Juan Andres Torres, Mircea V. Dusa, Robert John Socha, Luigi Capodieci, Jo Finders

Proceedings Volume 4404, Lithography for Semiconductor Manufacturing II; (2001) https://doi.org/10.1117/12.425215
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Even with increasing numerical apertures and decreasing wavelength sin optical lithography, the practical k₁ factor used in IC fabrication will continue to decrease ever closer to the theoretical 0.25 limit. This paper presents result of a feasibility study on 0.11 micrometers imaging with dipole illumination on a 0.70 NA KrF tool using a binary mask. The obvious advantage of dipole illumination techniques is the strong enhancement of exposure latitude (EL) and depth of focus (DOF) for specific dense structures. However, there are also many drawbacks for other feature types and geometries. These must be either avoided or overcome. To deal with these drawbacks int eh best way, detailed knowledge of the unwanted effects is needed. This article deals with two categories of trade-offs that must be considered when applying dipole illumination.

Citation Download Citation

Mark Eurlings, Eelco van Setten, Juan Andres Torres, Mircea V. Dusa, Robert John Socha, Luigi Capodieci, and Jo Finders "0.11-μm imaging in KrF lithography using dipole illumination", Proc. SPIE 4404, Lithography for Semiconductor Manufacturing II, (26 April 2001); https://doi.org/10.1117/12.425215

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available