Precise angle measurement technique for a vertical microstructure on substrate

Hoseong Kim; Jinhwan Ko

doi:10.1117/12.420905

4 April 2001 Precise angle measurement technique for a vertical microstructure on substrate

Hoseong Kim, Jinhwan Ko

Proceedings Volume 4301, Machine Vision Applications in Industrial Inspection IX; (2001) https://doi.org/10.1117/12.420905
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

A novel technique that can measure the angle of a vertical microstructure with an accuracy of 0.05 degree(s) has been developed. The microstructure has a movable micromirror that is the main component of Micro-Optical Cross Connect (MOXC) that switches and couples optical signals in the optical communication networks. Since the performance of MOXC strongly depends on the angle between the vertical micromirror and the substrate, it is very important to measure the angle with high resolution better than 0.05 degree(s). In order to get the side view of the microstructure, a microscope imaging system that employs a long working distance objective lens and CCD camera has been built.

Citation Download Citation

Hoseong Kim and Jinhwan Ko "Precise angle measurement technique for a vertical microstructure on substrate", Proc. SPIE 4301, Machine Vision Applications in Industrial Inspection IX, (4 April 2001); https://doi.org/10.1117/12.420905

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