Optical emission study of the plasma plume dynamics during excimer laser ablation of carbon in nitrogen atmosphere

Guangsheng Fu; Wei Yu; Shu-Fang Wang; Xiao-Wei Li; Lianshui Zhang; Li Han

doi:10.1117/12.402653

9 October 2000 Optical emission study of the plasma plume dynamics during excimer laser ablation of carbon in nitrogen atmosphere

Guangsheng Fu, Wei Yu, Shu-Fang Wang, Xiao-Wei Li, Lianshui Zhang, Li Han

Author Affiliations +

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402653
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper, the optical emission spectroscopy (OES) is used to study the plasma plume dynamics during XeCl laser ablation of carbon in nitrogen atmosphere. The optical emission spectrum of the plasma is mainly continuous emission near the target in its early formation stage. The discrete spectra can be detected 20ns later and reach the maximum at about 60-100ns. The temporal and spatial evolution of such characteristic peaks as C, C+ and C₂ emission lines exhibit different features. The OES results show that the plasma processing dynamics during excimer laser ablated carbon target is :the plasma is produced during the carbon absorbing the laser energy, the particles in the plasma continue their collision process after the laser pulse being over, which make the plasma ionized efficiently, and then the plasma continue expanding, declining and quenching. The creation and evolution mechanism of the active species is also discussed.

Citation Download Citation

Guangsheng Fu, Wei Yu, Shu-Fang Wang, Xiao-Wei Li, Lianshui Zhang, and Li Han "Optical emission study of the plasma plume dynamics during excimer laser ablation of carbon in nitrogen atmosphere", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402653

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