Prospects for high-power high-repetition-rate industrial excimer lasers

Vladimir M. Borisov; Oleg B. Khristoforov; Yurii B. Kirykhin; Aleksandr Yu. Vinokhodov; Andrei I. Demin; V. A. Vodchits; A. Eltzov

doi:10.1117/12.414086

25 January 2001 Prospects for high-power high-repetition-rate industrial excimer lasers

Vladimir M. Borisov, Oleg B. Khristoforov, Yurii B. Kirykhin, Aleksandr Yu. Vinokhodov, Andrei I. Demin, V. A. Vodchits, A. Eltzov

Author Affiliations +

Proceedings Volume 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (2001) https://doi.org/10.1117/12.414086
Event: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 2000, Florence, Italy

Abstract

Recent progress in excirner laser technology developed at TRINITI is reported. The key of the technologT is a combination of simple reliable UV preionizer based on creeping discharge on surface of a sapphire plate and the compact highly efficient gas flow system. This technology allows to develop very compact, high power, high repetition rate models of excimer lasers capable to deliver stabilized average power up to 500W (XeC1, KrF), 250W (ArF) and realise pulse repetition rate of more then 5 kHz..

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Vladimir M. Borisov, Oleg B. Khristoforov, Yurii B. Kirykhin, Aleksandr Yu. Vinokhodov, Andrei I. Demin, V. A. Vodchits, and A. Eltzov "Prospects for high-power high-repetition-rate industrial excimer lasers", Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); https://doi.org/10.1117/12.414086

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