Ablation of BN ceramics by femtosecond and picosecond laser pulses

Yoichi Hirayama; Minoru Obara

doi:10.1117/12.414006

25 January 2001 Ablation of BN ceramics by femtosecond and picosecond laser pulses

Yoichi Hirayama, Minoru Obara

Proceedings Volume 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (2001) https://doi.org/10.1117/12.414006
Event: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 2000, Florence, Italy

Abstract

Ablation of cubic-boron nitride (c-BN) and hexagonal-boron nitride (h-BN) ceramics irradiated with Ti:sapphire laser (110fs) and Nd:YAG laser (100ps) pulses is studied. The relationship between ablation rate and laser fluence for the Nd:YAG laser shows a semi-logarithmic formula for c-BN and h-BN, and also the ablation rate of h-BN by Ti:sapphire laser is observed similar to that by the Nd:YAG laser, except that of c-BN. It is found that there are two different regimes of ablation rate for c-BN as same as metals by Ti:sapphire laser ablation. In addition, it is found from XPS analysis and SEM observation that the area ablated with Ti:sapphire laser shows the BN surface unchanged and has no evidence of melting. These results are different from the ablated surface with the Nd:YAG laser. In short, the microscopic processing of BN ceramics using femtosecond Ti:sapphire laser shows little heat effect and keeps the chemical composition of the ablated surface unchanged.

Citation Download Citation

Yoichi Hirayama and Minoru Obara "Ablation of BN ceramics by femtosecond and picosecond laser pulses", Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); https://doi.org/10.1117/12.414006

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