Helical sensitive elements with layered filling

Andrey A. Yelizarov

doi:10.1117/12.410089

23 August 2000 Helical sensitive elements with layered filling

Andrey A. Yelizarov

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410089
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

This paper presents new technology sensors - helical sensitive elements (HSE) with layered filling. The use of HSE for RF- measurement transducers makes it possible quite efficiently to monitor and measure parameters of various industrial processes and materials. Difficulties arise when monitoring and measuring parameters of liquids such as the conductivity and the continuity of flow, and also the properties of materials with a large relative permittivity (epsilon) or permeability (mu) , such as ferrites. This is caused by the strong screening action of the monitored material or medium having high values of (epsilon) and (mu) on electromagnetic field of the slowed wave in the HSE. As the conductivity increases, the screening becomes even stronger, and this leads to a reduction in the sensitivity and measurement accuracy. The solution of such problems requires the creation and modeling of more complex designs of sensitive elements in which the screening action is weakened. Such an effect can be achieved by matching the field of a hybrid slowed wave to the medium being monitored, utilizing HSE base don layered magnetic and dielectric structures with a smooth variation of the electrodynamic parameters.

Citation Download Citation

Andrey A. Yelizarov "Helical sensitive elements with layered filling", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410089

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available