Ultrasonic actuation for MEMS dormancy-related stiction reduction

Ville Kaajakari; Shyi-Herng Kan; Li-Jen Lin; Amit Lal; M. Steven Rodgers

doi:10.1117/12.395709

10 August 2000 Ultrasonic actuation for MEMS dormancy-related stiction reduction

Ville Kaajakari, Shyi-Herng Kan, Li-Jen Lin, Amit Lal, M. Steven Rodgers

Proceedings Volume 4180, MEMS Reliability for Critical Applications; (2000) https://doi.org/10.1117/12.395709
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The use of ultrasonic pulses incident on surface micromachines has been shown to reduce dormancy-related failure. We applied ultrasonic pulses from the backside of a silicon substrate carrying SUMMiT processed surface micromachined rotors, used earlier as ultrasonic motors. The amplitude of the pulses was less than what is required to actuate the rotor (sub-threshold actuation). By controlling the ultrasonic pulse exposure time it was found that pulsed samples had smaller actuation voltages as compared to non-pulsed samples after twelve-hour dormancy. This result indicates that the micromachine stiction to surfaces during dormant period can be effectively eliminated, resulting in long-term stability of surface micromachines in critical applications.

Citation Download Citation

Ville Kaajakari, Shyi-Herng Kan, Li-Jen Lin, Amit Lal, and M. Steven Rodgers "Ultrasonic actuation for MEMS dormancy-related stiction reduction", Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); https://doi.org/10.1117/12.395709

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