Polymer UV-molding for micro-optical systems and O/E-integration

Peter Dannberg; Gunnar Mann; Lars Wagner; Andreas H. Braeuer

doi:10.1117/12.395684

18 August 2000 Polymer UV-molding for micro-optical systems and O/E-integration

Peter Dannberg, Gunnar Mann, Lars Wagner, Andreas H. Braeuer

Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395684
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The potential and limits of micromoulding technology for the wafer scale hybrid integration of micro-optic elements on top of arbitrary substrates like glass, Silicon, III/V-semiconductors by a process which is performed in a modified contact mask aligner. The elements are characterised by high precision and stability, temperature stable and precise pitch, index, homogeneity, uniformity across the wafer, and they fulfill additional requirements for a practical application (AR-coating, separation in a dicing saw). Additionally, the technology for a two- sided replication of elements has been developed. The precision of lens arrays fabricated by reflow and UV-moulding is investigated, and the high performance of these arrays in the collimation of fiber arrays is shown. Steps toward a wafer scale integration of lens arrays with vertical cavity surface emitting lasers (VCSELs) by locally selective replication are demonstrated.

Citation Download Citation

Peter Dannberg, Gunnar Mann, Lars Wagner, and Andreas H. Braeuer "Polymer UV-molding for micro-optical systems and O/E-integration", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395684

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