Micromechanical detectors for ferromagnetic resonance spectroscopy

John Moreland; Pavel Kabos; Albrecht Jander; Markus Loehndorf; Robert McMichael; Chan-Gyu Lee

doi:10.1117/12.395644

15 August 2000 Micromechanical detectors for ferromagnetic resonance spectroscopy

John Moreland, Pavel Kabos, Albrecht Jander, Markus Loehndorf, Robert McMichael, Chan-Gyu Lee

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395644
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

We demonstrate micromechanical detection of ferromagnetic resonance (FMR) in thin magnetic films. FMR spectroscopy is performed on nanometer scale samples integrated with a micromachined silicon cantilever. We present several techniques by which the FMR signal is coupled to a mechanical response of the cantilever. Cantilevers with low spring constants and high mechanical Q are essential for these measurements. Sub-nanometer displacements of the cantilever are detected using a laser beam-bounce system typical of many atomic force microscopes (AFM). The high sensitivities achieved by integrating the sample with the detector allow magnetic measurements on samples with total magnetic moments smaller than detectable with conventional magnetometers. Metrology applications for micromachined magnetometers include ultra-thin film material characterization, magnetic field microscopy, microwave field imaging, and deposition process monitors.

Citation Download Citation

John Moreland, Pavel Kabos, Albrecht Jander, Markus Loehndorf, Robert McMichael, and Chan-Gyu Lee "Micromechanical detectors for ferromagnetic resonance spectroscopy", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395644

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