Paper
5 January 2001 Simulated annealing in the design of broadband multilayers containing more than two materials
Keith Powell, Jamie M. Tait, Alan G. Michette
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Abstract
A new method of design for multilayer structures with broadband spectral responses is presented. A stochastic design approach is utilized, based upon a simulated (SA) annealing algorithm, which optimizes the multilayer structure for a particular set of criteria. In particular, we consider a mirror for which the requirement is for high reflectivity, over a broad wavelength range, in the soft x-ray region, as might be compatible with the output from a laser plasma source. The design algorithm is used to maximize a merit function for the structure by manipulating the ordering, the thickness and the material types of each of the constituent layers. The merit function may also be configured to include a number of other desirable properties for the high reflectivity mirror including broad angular response, polarization response and uniformity of reflectivity over a prescribed wavelength range.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keith Powell, Jamie M. Tait, and Alan G. Michette "Simulated annealing in the design of broadband multilayers containing more than two materials", Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); https://doi.org/10.1117/12.411645
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Reflectivity

Silicon

Algorithms

Mirrors

X-rays

Molybdenum

Multilayers

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