Graded x-ray multilayer optics for laboratory-based applications

Vladimir V. Protopopov

doi:10.1117/12.405888

2 November 2000 Graded x-ray multilayer optics for laboratory-based applications

Vladimir V. Protopopov

Proceedings Volume 4144, Advances in Laboratory-based X-Ray Sources and Optics; (2000) https://doi.org/10.1117/12.405888
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Design, technology, and applications of x-ray graded multilayer mirrors are discussed in the paper. Various mathematical optimization routines, such as steepest-descent, Powell, conjugated gradients, or needle-variation methods can be used to design depth-graded multilayers. The technology of manufacturing of this type of multilayers is based on the variation of a deposition time, while the spatial distribution of the deposition rate is uniform. Magnetron sputtering technique provides the accuracy of better than 1 angstrom for W/C structures. Laterally graded multilayers with desired spatial period distribution can be manufactured by magnetron sputtering technique using specially shaped slits positioned between the anode and the sample. Laboratory applications of graded mirrors include compact double- mirror conjugated focusing system of a Kirkpatrick-Baez type, programmable x-ray deflector, parabolic collimator with the output beam's angular divergence of 12 arc seconds, and dark- field refraction contrast imaging using multilayer mirrors with resonant absorption.

Citation Download Citation

Vladimir V. Protopopov "Graded x-ray multilayer optics for laboratory-based applications", Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); https://doi.org/10.1117/12.405888

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