Optical readout of uncooled thermal detectors

Panos G. Datskos; Slobodan Rajic; Larry R. Senesac; Dennis Duncan Earl; Boyd M. Evans III; James L. Corbeil; Irene Datskou

doi:10.1117/12.409842

15 December 2000 Optical readout of uncooled thermal detectors

Panos G. Datskos, Slobodan Rajic, Larry R. Senesac, Dennis Duncan Earl, Boyd M. Evans III, James L. Corbeil, Irene Datskou

Author Affiliations +

Proceedings Volume 4130, Infrared Technology and Applications XXVI; (2000) https://doi.org/10.1117/12.409842
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We investigated microposition sensing of micro-electro- mechanical systems (MEMS) that is based on optical readout techniques. We determined the parameters that affect or limit the performance of optical readout techniques especially as they apply to detection of infrared radiation. Such microposition sensing schemes are very important as readout mechanisms for large arrays of microstructures which are required for imaging. In addition, we explored the performance of uncooled micromechanical IR sensors using Fresnel zone plates (FZP). This type of diffractive feature diffracts along the optical axis and not perpendicular to that axis. We found that temperature fluctuation noise and background fluctuation noise, are currently the limits to the performance of uncooled micromechanical IR detectors. The noise at the output of the optical readout includes amplified noise from the micromechanical structures and noise added by the optical readout itself. However, the added noise is negligible compared to the amplified temperature fluctuation noise inherent in the microstructures. In this context an optical readout is nearly an ideal, noiseless readout method.

Citation Download Citation

Panos G. Datskos, Slobodan Rajic, Larry R. Senesac, Dennis Duncan Earl, Boyd M. Evans III, James L. Corbeil, and Irene Datskou "Optical readout of uncooled thermal detectors", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); https://doi.org/10.1117/12.409842

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available