X-ray study of the roughness of surfaces and interfaces

Igor V. Kozhevnikov; Victor E. Asadchikov; Inna N. Bukreeva; Angela Duparre; Yury S. Krivonosov; Christian Morawe; Vladimir I. Ostashev; Mikhail V. Pyatakhin; Eric Ziegler

doi:10.1117/12.405809

2 November 2000 X-ray study of the roughness of surfaces and interfaces

Igor V. Kozhevnikov, Victor E. Asadchikov, Inna N. Bukreeva, Angela Duparre, Yury S. Krivonosov, Christian Morawe, Vladimir I. Ostashev, Mikhail V. Pyatakhin, Eric Ziegler

Author Affiliations +

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405809
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The potentialities of the x-ray scattering methods (XRS) for quantitative testing of supersmooth surfaces, thin films, and multilayer structures are discussed. The results of the surface roughness study with the use of XRS technique in hard and sort x-ray spectral regions are compared with independent measurements of the roughness by atomic force microscopy (AFM). It is demonstrated that the results obtained by XRS and AFM are in a very good agreement in spite of different physical principles and underlying the methods. XRS technique is applied for the roughness study of thin films which are used in applications for x-ray and UV optics. The XRS method is demonstrated to enable quantitative evaluation of PSD functions of both the film interfaces and the correlation between the substrate and film roughnesses. X-ray investigations of the correlation of the roughnesses of short-period multilayer structures are discussed as well. The use of the whispering gallery effect is demonstrated to extend the XRS method to control of the concave surface roughness.

Citation Download Citation

Igor V. Kozhevnikov, Victor E. Asadchikov, Inna N. Bukreeva, Angela Duparre, Yury S. Krivonosov, Christian Morawe, Vladimir I. Ostashev, Mikhail V. Pyatakhin, and Eric Ziegler "X-ray study of the roughness of surfaces and interfaces", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405809

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