Requests to an optimal process and plant management from a production point of view

Matthias Heller; Jack Hsu; Joerg Terhuerne

doi:10.1117/12.404760

19 October 2000 Requests to an optimal process and plant management from a production point of view

Matthias Heller, Jack Hsu, Joerg Terhuerne

Proceedings Volume 4094, Optical and Infrared Thin Films; (2000) https://doi.org/10.1117/12.404760
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Well done designs and well equipped machines are only half the way to reproducible and stable quality of a coating production. To achieve this aim it is also necessary to have a complex production management system to one's disposal, including recipe management, machinery management and quality assurance. Most production errors and rejects are caused by wrong handling, which can be leaded back to a lack of actual information, or by errors of measurement-systems and by fails of equipment during a coating process. So, the very simple rules one has to observe are: 1.) Transfer really all necessary information about the process to operator and to machine and force the operator to read this information, by using an online-checklist during charging a batch. 2.) Never trust in a single measurement-result of your plant-equipment, without a cross-check to independent generated data's; redundancy is the magic word for process-assurance. 3.) Check the status of your equipment as often as possible; integrate a maintenance plan in your plant control and let the machine record all parameters, which are relevant for wearing parts or media. This essay will show, how to organize your recipe parameters, transfering information to plant and operator, methods for redundancy and cross-checks of parameters, and an example for a complex coating system based on a LH-A700QE.

Citation Download Citation

Matthias Heller, Jack Hsu, and Joerg Terhuerne "Requests to an optimal process and plant management from a production point of view", Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); https://doi.org/10.1117/12.404760

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