Micromachining using femtosecond lasers

Hans Kurt Toenshoff; Andreas Ostendorf; Stefan Nolte; Frank Korte; Thorsten Bauer

doi:10.1117/12.405700

6 November 2000 Micromachining using femtosecond lasers

Hans Kurt Toenshoff, Andreas Ostendorf, Stefan Nolte, Frank Korte, Thorsten Bauer

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405700
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Femtosecond laser systems have been proved to be effective tools for high precision micro-machining. Almost all solid materials can be processed with high precision. The dependence on material properties like thermal conductivity, transparency, heat- or shock sensitivity is strongly reduced and no significant influence on the remaining bulk material is observed after ablation using femtosecond laser pulses. In contrast to conventional laser processing, where the achievable precision is reduced due to a formed liquid phase causing burr formation, the achievable precision using femtosecond pulses is only limited by the diffraction of the used optics. Potential applications of this technique, a\including the structuring of biodegradable polymers for cardiovascular implants, so-called stents, as well as high precision machining of transparent materials are presented.

Citation Download Citation

Hans Kurt Toenshoff, Andreas Ostendorf, Stefan Nolte, Frank Korte, and Thorsten Bauer "Micromachining using femtosecond lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405700

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available