Replication Technique For Determining The Microroughness Of Large Or Unusually Shaped Optics

Darrell L. Gourley; Helen E. Gourley; Jean M. Bennett

doi:10.1117/12.935523

28 November 1983 Replication Technique For Determining The Microroughness Of Large Or Unusually Shaped Optics

Darrell L. Gourley, Helen E. Gourley, Jean M. Bennett

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935523
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

A two-stage replication technique has been developed that will enable microroughness measurements to be made on large or unusually shaped optics that cannot be measured using existing techniques. A small, first-stage replica of room-temperature-vulcanizing (RTV) silicone rubber is made of one or more parts of the surface. This material exactly replicates surface details and separates easily from most glass and metal optics. A second-stage epoxy replica is then made from the first-stage replica. It also preserves surface details and can be easily separated from the first-stage replica. The epoxy replica can be aluminized for Nomarski microscope examination, interferometric or scattering measurements, and can also be profiled with a diamond stylus probe. Examples are given of various types of surfaces and their replicas. Surface profiles are also shown of two masters and their replicas. This two-stage replication technique has been found to give excellent replication of surface detail, along with adequate preservation of surface flatness and a minimum lateral dimensional change, 0.3%. It is thus an excellent method for sampling small surface areas of large optics.

Citation Download Citation

Darrell L. Gourley, Helen E. Gourley, and Jean M. Bennett "Replication Technique For Determining The Microroughness Of Large Or Unusually Shaped Optics", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935523

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