Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays

Lars Montelius; Babak Heidari; Mariusz Graczyk; Torbjoern Ling; Ivan Maximov; Eva-Lena Sarwe

doi:10.1117/12.390081

21 July 2000 Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays

Lars Montelius, Babak Heidari, Mariusz Graczyk, Torbjoern Ling, Ivan Maximov, Eva-Lena Sarwe

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390081
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Nanoimprint lithography over 2 inch wafers with a patterned area of 40,000 micrometer squared consisting of interdigitated lines of 100 nm width with varying distance between the lines has been performed. By performing metal lift-off and subsequent UV-lithography for definition of contact regions and pads, complete metal arrays have been fabricated. The structure is electrically characterized by admittance spectroscopy. In this paper we describe the design and realization of a compact nanoimprint lithography system. Furthermore, various aspects of nanoimprint lithography are discussed, and nanoimprint lithography is compared with other nanostructuring technologies.

Citation Download Citation

Lars Montelius, Babak Heidari, Mariusz Graczyk, Torbjoern Ling, Ivan Maximov, and Eva-Lena Sarwe "Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390081

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