Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication

Shoji Maruo; Koji Ikuta

doi:10.1117/12.382800

17 April 2000 Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication

Shoji Maruo, Koji Ikuta

Proceedings Volume 3937, Micro- and Nano-photonic Materials and Devices; (2000) https://doi.org/10.1117/12.382800
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We report the latest 3D fabrication system based on two- photon-initiated polymerization. In two-photon 3D microfabrication, 3D microstructures can be made by scanning an ultrashort-pulsed near-IR laser beam inside liquid photopolymer without layer-by-layer process. Our current system has achieved lateral and depth resolutions of 0.2 micrometers and 0.28 micrometers , respectively. Movable micromechanisms, i.e., microgears, can be also fabricated without any use of supporting parts. For instance, a microgear with an attached shaft was successfully fabricated. Rotation of a microgear was verified during washing out unsolidified photopolymer.

Citation Download Citation

Shoji Maruo and Koji Ikuta "Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication", Proc. SPIE 3937, Micro- and Nano-photonic Materials and Devices, (17 April 2000); https://doi.org/10.1117/12.382800

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