Effect of SiO2 cladding on properties of annealed proton-exchanged LiNbO3 waveguides

Yuri N. Korkishko; Vyacheslav A. Fedorov; Oksana Y. Feoktistova; Tamara V. Morozova; Evgenii M. Paderin

doi:10.1117/12.379946

24 March 2000 Effect of SiO₂ cladding on properties of annealed proton-exchanged LiNbO₃ waveguides

Yuri N. Korkishko, Vyacheslav A. Fedorov, Oksana Y. Feoktistova, Tamara V. Morozova, Evgenii M. Paderin

Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379946
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We show that SiO₂ cladding effects on optical properties of annealed proton-exchanged (APE) LiNbO₃ waveguides as well as on kinetic of annealing process. Annealing with previously deposited SiO₂ film reduces the optical losses in APE LiNbO₃ waveguides. The structural phase diagram of H_xLi_1-xNbO₃ is also modified if annealing is performed with previously deposited SiO₂ layer. The physical mechanisms, including evaporation of H₂O and/or Li₂O during annealing without deposited film and, as a result, formation of defects and lithium deficit phase is discussed.

Citation Download Citation

Yuri N. Korkishko, Vyacheslav A. Fedorov, Oksana Y. Feoktistova, Tamara V. Morozova, and Evgenii M. Paderin "Effect of SiO₂ cladding on properties of annealed proton-exchanged LiNbO₃ waveguides", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379946

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