Integration of a microlens on a micro XY-stage

Che-Heung Kim; Yong-Kweon Kim

doi:10.1117/12.364508

1 October 1999 Integration of a microlens on a micro XY-stage

Che-Heung Kim, Yong-Kweon Kim

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364508
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

The precise position control of an optic element is a quite important technology and thus has many applications in modern optic system. This paper describes the optic system composed of a micro lens and positioning actuator. Two types of the micro Fresnel lens and the micro spherical lens are fabricated by using UV-lithography and reactive ion etching (RIE). The monolithic spherical lens is fabricated through the photo-thermal technique of photoresist. 3 mm-focal length with 246 micrometers -diameter Fresnel lens and 31 micrometers - focal length with 50 micrometers -diameter spherical lens are fabricated. The XY-stage is proposed as a control actuator, which is a 2-degree of freedom-stage structure with a pari of perpendicularly combined comb drive. The travel range of the micro XY-stage is measured 48 micrometers in each X and Y direction. The mechanical interference between X- and Y-axis is negligible. Integration process of these two parts is based on the concept of in-situ process using anodic bonding. This device is expected to be applicable for the fields of optical pickup, light beam aligning and optical signal sensing.

Citation Download Citation

Che-Heung Kim and Yong-Kweon Kim "Integration of a microlens on a micro XY-stage", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364508

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