Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter

Xiaolin Zhao; Chunsheng Yang; Guifu Ding; Mingsheng Zhang

doi:10.1117/12.364463

29 September 1999 Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter

Xiaolin Zhao, Chunsheng Yang, Guifu Ding, Mingsheng Zhang

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364463
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Microactuator is one of the important parts in MEMS, various types of microactuators have been developed, which utilize different driving principles such as electrostatic force, piezoelectric effect, shape memory alloys and electromagnetic force. In this paper, the fabrication process of stator winding of (phi) 1mm electromagnetic micromotor is discussed. With high-aspect-ratio photolithography process and mask-plating process, the high- aspect-ratio coils can be fabricated, which greatly reduce the resistance and heat of stator winding. With thick sputtered Al₂O₃ films as isolation layers between coils, heat resistance of stator winding is improved. A stator winding has been fabricated, which is composed of 6 layer coils, 42 turns and 9 pairs, its diameter is 1mm and minimum line space is 1 micrometers , the maximum operation current of the coils is 180mA and resistor is 12-20 (Omega) . The output torque of the electromagnetic micromotor is 1.5 (mu) Nm. the rotational speed of the motor can be adjusted from several hundred to over ten thousand turns per minute and the rotational direction is reversible.

Citation Download Citation

Xiaolin Zhao, Chunsheng Yang, Guifu Ding, and Mingsheng Zhang "Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364463

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