Linear magnetic position sensor for automotive applications

Zhixiang Liu; Li Tian; Jim Parham; A. Bruno Frazier

doi:10.1117/12.360507

31 August 1999 Linear magnetic position sensor for automotive applications

Zhixiang Liu, Li Tian, Jim Parham, A. Bruno Frazier

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360507
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this work, a linear position sensor with a Hall effect element for automotive applications is presented. The work involves the design of device structure, finite element analysis (FEA) computer modeling of sensor performance, fabrication of sensor prototype, and prototype characterization. The significance of the work is a low cost linear position sensor has been developed with high linearity for use in automobile control systems. The complete sensor system is designed for ease of manufacturing and the harsh automotive environments. The output data from the two- dimensional basic ideal structure model shows high linearity over a range of 11 mm. Models of temperature coefficient effect (TCE), electromagnetic interference (EMI), and several optimized device structures, including reducing the thickness of bottom material, shaping of the corners as well as adding shield material were also analyzed. The sensor prototype was fabricated and characterized. The modeling data were compared with the measurement results from the sensor prototype.

Citation Download Citation

Zhixiang Liu, Li Tian, Jim Parham, and A. Bruno Frazier "Linear magnetic position sensor for automotive applications", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360507

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