Concrete pedestals for high-performance semiconductor production equipment

Wayne Vogen; Craig L. Franklin; Joseph Morneault

doi:10.1117/12.363839

28 September 1999 Concrete pedestals for high-performance semiconductor production equipment

Wayne Vogen, Craig L. Franklin, Joseph Morneault

Proceedings Volume 3786, Optomechanical Engineering and Vibration Control; (1999) https://doi.org/10.1117/12.363839
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Concrete pedestals have many vibration and stiffness characteristics that make them a superior choice for sensitive semiconductor production equipment including scanners, scanning electron microscopes, focused ion beam millers and optical inspection equipment. Among the advantages of concrete pedestals are high inherent damping, monolithic construction that eliminates low stiffness joints common in steep pedestals, ability to reuse and ease of installation. Steel pedestals that have plates attached to the top of the frame are easily excited by acoustic excitation, especially in the range from 50 Hertz to 400 Hertz. Concrete pedestals do not suffer from this phenomenon because of the high mass and damping of the top surface.

Citation Download Citation

Wayne Vogen, Craig L. Franklin, and Joseph Morneault "Concrete pedestals for high-performance semiconductor production equipment", Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); https://doi.org/10.1117/12.363839

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