Three-dimensional topography measurement with triangular beam scanning technique

Jianfeng Jiang; Yonghui He; Wansheng Zhao

doi:10.1117/12.366699

25 October 1999 Three-dimensional topography measurement with triangular beam scanning technique

Jianfeng Jiang, Yonghui He, Wansheng Zhao

Proceedings Volume 3784, Rough Surface Scattering and Contamination; (1999) https://doi.org/10.1117/12.366699
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper presents a system for three-dimensional topography measurement, of both smooth and rough surface, based on triangular beam scanning technique. This system utilizes a simple but efficient principle based on the general principle of light-section method and the idea of light scanning technique to acquire topography. Its ability of anti- interference is powerful and it can be used at locale of manufacturing.

Citation Download Citation

Jianfeng Jiang, Yonghui He, and Wansheng Zhao "Three-dimensional topography measurement with triangular beam scanning technique", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366699

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