Paper
21 October 1999 XUV spectroscopy of laser plasma from molecular coated metal targets
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Abstract
Metal targets covered by micrometer layers of metal- phthalocyanines are studied here. An increase in EUV yield due to optimized absorption of the laser field is reported. Effects of high-temperature plasma rapid expansion (velocity about 106 cm/s) were observed. Moderate power nanosecond and picosecond neodymium lasers are used to product an incident intensity of 1011 to 1013 W/cm2 on the targets. The plasma electron density was measured by fitting observed spectral profiles to theoretical profiles. Collisional, Doppler, and Stark broadening mechanisms were considered in the calculations. Our measurement technique makes it possible to determine the electron density and temperature dependence on distances from the target surface from 1 mm (where Ne equals 2.0 (+/- 0.5)1018 cm-3 and Te equals 14 eV are measured for aluminum plasma) up to approximately 5 mm (where Ne <EQ 1017 cm-3). Electron temperature was measured by comparing intensities of spectral lines, belonging to the ions having a different degree of ionization. Preliminary experiments show that conversion efficiency for molecular coated targets is greater by a factor of approximately 1.5 than measured from bulk solid metal targets.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valeri O. Papanyan, Gagik Ts. Nersisyan, and Frank K. Tittel "XUV spectroscopy of laser plasma from molecular coated metal targets", Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); https://doi.org/10.1117/12.366676
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KEYWORDS
Plasma

Aluminum

Absorption

Extreme ultraviolet

Molecular lasers

Coating

Metals

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