Smoothing of mirror substrates by thin-film deposition

Eberhard Adolf Spiller; Sherry L. Baker; Enrique Parra; Charles Tarrio

doi:10.1117/12.371112

23 November 1999 Smoothing of mirror substrates by thin-film deposition

Eberhard Adolf Spiller, Sherry L. Baker, Enrique Parra, Charles Tarrio

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371112
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement.

Citation Download Citation

Eberhard Adolf Spiller, Sherry L. Baker, Enrique Parra, and Charles Tarrio "Smoothing of mirror substrates by thin-film deposition", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371112

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