Optical constants of beryllium from photoabsorption measurements for x-ray optics applications

Regina Soufli; Sasa Bajt; Eric M. Gullikson

doi:10.1117/12.371124

23 November 1999 Optical constants of beryllium from photoabsorption measurements for x-ray optics applications

Regina Soufli, Sasa Bajt, Eric M. Gullikson

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371124
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Beryllium (Be) has been recently receiving considerable attention as the key material for a range of potential applications in the extreme ultraviolet (EUV) and x-ray region. Most notably, it has been successfully implemented as the spacer material in beryllium-based multilayer mirrors for EUV lithography, achieving experimental reflectivities of about 70% at wavelengths around 11.4 nm. Knowledge of the absorptive and dispersive properties of this material thus becomes important for the modeling of these optics. Experimental photoabsorption results in the region 40 - 250 eV, derived from transmission measurements on free-standing beryllium foils, are presented in this work. The measured absorption in the region extending a few tens eV below the K edge (111.7 eV) appears to be significantly (up to 50%) lower than the tabulated values. Fine structure above the K edge is also demonstrated in the measurements. These data are incorporated in an updated set for the atomic scattering factors of beryllium, obtained in the range 0.1 - 30,000 eV. Finally, the Bragg reflectivity of Mo/Be multilayer optics is modeled using the new experimental results.

Citation Download Citation

Regina Soufli, Sasa Bajt, and Eric M. Gullikson "Optical constants of beryllium from photoabsorption measurements for x-ray optics applications", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371124

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