Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

Sasa Bajt; Ricke D. Behymer; Paul B. Mirkarimi; Claude Montcalm; Mark A. Wall; Marco Wedowski; James A. Folta

doi:10.1117/12.371125

23 November 1999 Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

Sasa Bajt, Ricke D. Behymer, Paul B. Mirkarimi, Claude Montcalm, Mark A. Wall, Marco Wedowski, James A. Folta

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371125
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The performance of beryllium-based multilayer coatings designed to reflect light of wavelengths near 11 nm, at normal incidence, is presented. These multilayer coatings are of special interest for extreme ultraviolet lithography (EUVL). The beryllium-based multilayers investigated were Mo/Be, Ru/Be and a new material combination Mo₂C/Be. The highest reflectivity achieved so far is 70% at 11.3 nm with 70 bilayers of Mo/Be. However, even though high reflectivity is very important, there are other parameters to satisfy the requirements for an EUVL production tool. Multilayer stress, thermal stability, radiation stability and long term reflectance stability are of equal or greater importance. An experimental characterization of several coatings was carried out to determine the reflectivity, stress, microstructure, and long term stability of these coatings. Theoretically calculated reflectivities are compared with experimental results for different material pairs; differences between experimental and theoretical reflectivities and bandwidths are addressed.

Citation Download Citation

Sasa Bajt, Ricke D. Behymer, Paul B. Mirkarimi, Claude Montcalm, Mark A. Wall, Marco Wedowski, and James A. Folta "Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371125

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