Grazing incidence interferometry with the help of diffractive masters

Johannes Schwider; Sven Brinkmann; Roland Schreiner; Thomas Dresel

doi:10.1117/12.354753

19 July 1999 Grazing incidence interferometry with the help of diffractive masters

Johannes Schwider, Sven Brinkmann, Roland Schreiner, Thomas Dresel

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354753
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

The test of rod-like technical objects can be carried out in grazing incident using diffractive optical elements as beam splitters and at the same time as generators for master wave fronts. The occurring interference patterns can be evaluated with the help of the well known phase shifting technique. Wave aberrations caused by the adjustment state of the test sample can be removed from the data set via least squares fitting a functional representing the wave aberrations due to misalignments.

Citation Download Citation

Johannes Schwider, Sven Brinkmann, Roland Schreiner, and Thomas Dresel "Grazing incidence interferometry with the help of diffractive masters", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354753

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