Birefringent scatterplate phase-shifting interferometer

Michael B. North Morris; Jay Van Delden; James C. Wyant

doi:10.1117/12.354821

19 July 1999 Birefringent scatterplate phase-shifting interferometer

Michael B. North Morris, Jay Van Delden, James C. Wyant

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354821
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

A new phase shifting scatterplate interferometer is realized by exploiting the polarization characteristics of a birefringent scatterplate. The advantages of this design are that it does not require any optical components to be placed near the surface under test and, the hot spot and background intensity, which are inherent to scatterplate interferometers, are eliminated. The theory of the interferometer is presented.

Citation Download Citation

Michael B. North Morris, Jay Van Delden, and James C. Wyant "Birefringent scatterplate phase-shifting interferometer", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354821

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