Apochromatic reflection optics used in UV interferometry

Andreas Pfoertner; Wolfgang Emer; Johannes Schwider

doi:10.1117/12.357805

17 August 1999 Apochromatic reflection optics used in UV interferometry

Andreas Pfoertner, Wolfgang Emer, Johannes Schwider

Proceedings Volume 3745, Interferometry '99: Applications; (1999) https://doi.org/10.1117/12.357805
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

An interferometer for VUV wavelengths was realized in order to improve the resolution and the sensitivity of optical metrology. To be able to work at wavelengths 157 nm up to 900 nm an apochromatic design was chosen using reflective optics. For the examination of the influence of the wavelength binary gratings with different periods, aspect ratios and depths, have been selected as test structures. The benefits and also the technological problems which come along with the use of VUV wavelengths are discussed. The design of this interferometer and measuring results with different wavelengths are presented.

Citation Download Citation

Andreas Pfoertner, Wolfgang Emer, and Johannes Schwider "Apochromatic reflection optics used in UV interferometry", Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); https://doi.org/10.1117/12.357805

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