Influence of phase singularities on the interferometric measurement of out-of-plane displacements

Ervin Kolenovic; Wolfgang Osten; Werner P. O. Jueptner

doi:10.1117/12.357710

13 August 1999 Influence of phase singularities on the interferometric measurement of out-of-plane displacements

Ervin Kolenovic, Wolfgang Osten, Werner P. O. Jueptner

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357710
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Singularities in speckle fields are single points where the phase value is not defined. Consequently phase singularities decrease the resolution of interferometric measurement methods such as ESPI or HI. In this paper the behavior of phase singularities in the image plane is investigated for the case that the illuminated object is displaced along the optical axis. The investigations have been performed by means of simulations and measurements. Both, the model used to simulate subjective speckle fields and the experimental setup to measure the phase changes in the image plane are described. To observe the appearance and the disappearance of singularities, the object displacement was divided into a series of smaller displacement steps. The lateral speckle phase in the image plane was generated numerically for each displacement step. This way the transformation of the whole phase field could be visualized and the path of the singularities could be traced. The results obtained from these simulations are verified experimentally: For each displacement step the speckle phase was measured interferometrically along a column of a CCD-sensor. The behavior of the measured speckle phase is compared to the numerical results. Based on these results the consequences for interferometric out-of-plane displacement measurements are discussed.

Citation Download Citation

Ervin Kolenovic, Wolfgang Osten, and Werner P. O. Jueptner "Influence of phase singularities on the interferometric measurement of out-of-plane displacements", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357710

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