High-sensitivity surface measurements by a heterodyne white-light interferometer

Akiko Hirai; Hirokazu Matsumoto

doi:10.1117/12.347802

7 May 1999 High-sensitivity surface measurements by a heterodyne white-light interferometer

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347802
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A novel low-coherence interferometer has been developed, based on the heterodyne technique for highly accurate and sensitive positioning of a three-dimensional (3-D) object, which uses two acousto-optic modulators (AOM's) and two spherical reflecting mirrors in a Michelson interferometer. By using this technique in a tandem interferometer, the profiles of diffusing and mirror-likes surfaces of the 3-D objects are measured with a high accuracy of 50 nm from the heterodyne signals of 200 kHz.

Citation Download Citation

Akiko Hirai and Hirokazu Matsumoto "High-sensitivity surface measurements by a heterodyne white-light interferometer", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347802

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available