Membranes fabricated on a silicon support for the microsensors with the ultrasonic Lambda-type wave

Jacek Golebiowski; Tadeusz Budzynski; Piotr B. Grabiec; Jerzy Jazwinski; Jan Koszur

doi:10.1117/12.346837

30 April 1999 Membranes fabricated on a silicon support for the microsensors with the ultrasonic Lambda-type wave

Jacek Golebiowski, Tadeusz Budzynski, Piotr B. Grabiec, Jerzy Jazwinski, Jan Koszur

Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346837
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland

Abstract

The construction of the microsensor with the ultrasonic wave Lambda-type as well as the conditions of the wave propagation were presented. The possibilities of the fabrication of multi-layer membranes on the silicon base using the microelectronics technologies were presented and discussed. The analysis of the usefulness of the processes mentioned to the production of the thin membrane sensors was carried out taking the intrinsic stresses into consideration. The summary of the experimental results was done and the most useful parameters of the membrane ultrasonic sensors were pointed out.

Citation Download Citation

Jacek Golebiowski, Tadeusz Budzynski, Piotr B. Grabiec, Jerzy Jazwinski, and Jan Koszur "Membranes fabricated on a silicon support for the microsensors with the ultrasonic Lambda-type wave", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); https://doi.org/10.1117/12.346837

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