Nonconventional transition layer formation during PLD of nanometer-period multilayers

Andre A. Gorbunov; K. Brand; H. Geisler; J. Noetzel; B. Wehner; A. Tselev; Vladimir S. Kharlamov; Hermann Mai; J. Thomas; Hannes Lichte; W. Pompe; J. Trushin; E. Wieser; Hartmut Worch

doi:10.1117/12.347430

5 May 1999 Nonconventional transition layer formation during PLD of nanometer-period multilayers

Andre A. Gorbunov, K. Brand, H. Geisler, J. Noetzel, B. Wehner, A. Tselev, Vladimir S. Kharlamov, Hermann Mai, J. Thomas, Hannes Lichte, W. Pompe, J. Trushin, E. Wieser, Hartmut Worch

Author Affiliations +

Proceedings Volume 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (1999) https://doi.org/10.1117/12.347430
Event: International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 1998, St. Petersburg, Russian Federation

Abstract

During pulsed laser deposition ions with kinetic energies of the order of 100 eV can already cause intermixing of nm- periodical multilayers followed by non-conventional phase formation in the transition layers. In the present paper experimental studies of concentration profiles in Ni/C, Fe/Al, Co/Cu multilayers prepared by pulsed laser deposition are compared with ballistic simulations of the deposition process. It was found that generally the ballistic simulation provides the right order of magnitude of the real transition layer width. Unusual phase formation in transition layers including supersaturation, amorphization, pseudomorphism, demixing, and interface coarsening are considered to be a result of solid- state processes directed towards minimization of the free energy of the system.

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Andre A. Gorbunov, K. Brand, H. Geisler, J. Noetzel, B. Wehner, A. Tselev, Vladimir S. Kharlamov, Hermann Mai, J. Thomas, Hannes Lichte, W. Pompe, J. Trushin, E. Wieser, and Hartmut Worch "Nonconventional transition layer formation during PLD of nanometer-period multilayers", Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); https://doi.org/10.1117/12.347430

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