Experimental study and computer simulation of AlN and BN sputtering

S. S. Elovikov; E. Yu. Zykova; A. A. Promokhov; V. E. Yurasova

doi:10.1117/12.347434

5 May 1999 Experimental study and computer simulation of AlN and BN sputtering

S. S. Elovikov, E. Yu. Zykova, A. A. Promokhov, V. E. Yurasova

Proceedings Volume 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (1999) https://doi.org/10.1117/12.347434
Event: International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 1998, St. Petersburg, Russian Federation

Abstract

The radiation stability of AlN polycrystals with wurzite structure and BN polycrystals with hexagonal and rhombohedral structure irradiated with Ar⁺ and Kr⁺ ions was studied experimentally and by computer simulation for normal and oblique incidence. Absolute values of the sputtering yield from AlN were measured for the first time and used to choose the binding energy in the simulation model. Radiation strength of BN to ion irradiation is much higher than that of AlN. The effect of low-energy electron irradiation on surface structure was studied. It was found that, in contrast with BN, the surface of AlN is not modified by electrons.

Citation Download Citation

S. S. Elovikov, E. Yu. Zykova, A. A. Promokhov, and V. E. Yurasova "Experimental study and computer simulation of AlN and BN sputtering", Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); https://doi.org/10.1117/12.347434

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