Integrated CAD tools for top-down design of MEMS/MOEMS systems

Bart F. Romanowicz; Stephen F. Bart; John R. Gilbert

doi:10.1117/12.341200

10 March 1999 Integrated CAD tools for top-down design of MEMS/MOEMS systems

Bart F. Romanowicz, Stephen F. Bart, John R. Gilbert

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341200
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Development of MEMS/MOEMS products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of MST requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly supports such an integrated design process.

Citation Download Citation

Bart F. Romanowicz, Stephen F. Bart, and John R. Gilbert "Integrated CAD tools for top-down design of MEMS/MOEMS systems", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341200

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